Parasitic Inductance Analysis — Loop Inductance Extraction and Reduction Design in Power Electronics

Category: 電磁場解析 › パワーエレクトロニクス | Integrated 2026-04-11
Parasitic inductance analysis showing loop inductance extraction from power module busbar with 3D FEM current density distribution
パワーモジュールのバスバー構造におけるループインダクタンスの3D FEM解析

Theory and Physics

Overview — Why nH is Fatal

🧑‍🎓

Teacher, what's the problem with parasitic inductance? It's a small value in nH units, right? Is it really something worth analyzing with CAE?

🎓

That "mere nH" can be fatal. The key is the magnitude of di/dt (rate of change of current). In recent SiC MOSFET switching, $di/dt$ reaches 10 A/ns. At that time, even just 10 nH of parasitic inductance causes:

$$ V_{surge} = L_{parasitic} \cdot \frac{di}{dt} = 10\,\text{nH} \times 10\,\frac{\text{A}}{\text{ns}} = 100\,\text{V} $$

That is, a 100 V surge voltage is generated. For an 800 V rated SiC MOSFET with a bus voltage of 600 V, 600 + 100 = 700 V is barely within limits. If the parasitic inductance is 20 nH, a 200 V surge would exceed the rating and destroy the device.

🧑‍🎓

What, 10 nH gives 100 V!? Wasn't it such a problem in the Si IGBT era?

🎓

Si IGBT's di/dt is at most about 1 A/ns. Even with 10 nH, only a 10 V surge occurs. So in the past, it was okay with "even if the wiring is a bit long, it's probably fine." High-speed switching of SiC/GaN has made di/dt more than 10 times higher, so the impact of parasitic inductance has suddenly become apparent. Extracting and minimizing the inductance of current loops formed by busbar or PCB conductor layouts using 3D FEM or PEEC methods has become essential in today's design.

🧑‍🎓

I see... So with increased switching speed, the era where wiring shape determines performance has arrived. But first, where does parasitic inductance come from?

🎓

Wherever current flows, a magnetic field is generated. The magnetic field storing energy means inductance exists there. Specifically:

  • Busbar — A large distance between DC+ and DC- conductors increases loop area, resulting in tens of nH
  • Inside power modules — About 2–5 nH per bonding wire
  • PCB vias and traces — About 0.5–1 nH per via
  • Decoupling capacitor leads — ESL (Equivalent Series Inductance) of 1–5 nH

When these sum to tens of nH, it becomes a serious surge voltage issue for SiC. Moreover, parasitic inductance is determined by geometric arrangement, so it doesn't appear in schematics. That's why 3D electromagnetic field analysis is necessary.

Governing Equations for Surge Voltage

🧑‍🎓

Besides V = L・di/dt, are there other important equations related to parasitic inductance?

🎓

First, let's organize three basic equations.

1. Surge Voltage (at turn-off)

$$ V_{DS,peak} = V_{DC} + L_{loop} \cdot \frac{di}{dt} + V_{diode} $$

Here $V_{DC}$ is the bus voltage, $L_{loop}$ is the total inductance of the switching loop, and $V_{diode}$ is the forward voltage drop of the diode.

2. Stored Magnetic Energy

$$ W_{mag} = \frac{1}{2} L_{loop} \cdot I_{peak}^2 $$

This energy is absorbed by snubber circuits or the device's parasitic capacitance. If too large, ringing (oscillation) prolongs and becomes a source of EMI.

3. Ringing Frequency

$$ f_{ring} = \frac{1}{2\pi\sqrt{L_{loop} \cdot C_{oss}}} $$

$C_{oss}$ is the device's output capacitance. LC resonance between $L_{loop}$ and $C_{oss}$ causes high-frequency ringing in the tens to hundreds of MHz after switching. This very often causes EMI standard violations.

🧑‍🎓

So it's not just surge voltage, but also directly linked to EMI (Electromagnetic Interference). So reducing parasitic inductance is effective for both voltage margin and EMI countermeasures.

🎓

Exactly. Therefore, in power electronics design, "how to minimize loop inductance" is the starting point for everything. Target values are:

  • Si IGBT: $L_{loop}$ < 50 nH is generally OK
  • SiC MOSFET: $L_{loop}$ < 10 nH is the target, ideally below 5 nH
  • GaN HEMT: $L_{loop}$ < 2 nH, assuming chip-scale packages

Partial Inductance and Loop Inductance

🧑‍🎓

Looking at inductance extraction results, I see two types: "partial inductance" and "loop inductance." What's the difference?

🎓

This is the most important concept in parasitic inductance analysis, so understand it well.

Loop inductance is a physical quantity defined for the entire closed circuit, the "real" inductance measurable with a VNA or impedance analyzer:

$$ L_{loop} = \frac{\Phi_{total}}{I} = \frac{1}{I} \oint_S \mathbf{B} \cdot d\mathbf{S} $$

On the other hand, partial inductance is a concept proposed by Ruehli in 1972, a mathematical tool to "attribute" inductance to individual conductor segments:

$$ L_{p,ii} = \frac{\mu_0}{4\pi} \int_{l_i} \int_{l_i} \frac{d\mathbf{l}_i \cdot d\mathbf{l}_i'}{|\mathbf{r} - \mathbf{r}'|} \quad \text{(Self Partial Inductance)} $$
$$ M_{p,ij} = \frac{\mu_0}{4\pi} \int_{l_i} \int_{l_j} \frac{d\mathbf{l}_i \cdot d\mathbf{l}_j}{|\mathbf{r}_i - \mathbf{r}_j|} \quad \text{(Mutual Partial Inductance)} $$

And loop inductance is calculated from partial inductance as follows:

$$ L_{loop} = \sum_i L_{p,ii} - 2\sum_{i < j} M_{p,ij} $$

The closer the forward and return paths are, the larger $M_{p,ij}$ becomes, and $L_{loop}$ becomes smaller. This is the mathematical explanation for why "bringing conductors closer reduces inductance."

🧑‍🎓

I see! Partial inductance is a concept for assigning to individual parts, and only loop inductance can actually be measured. So the reason laminated busbars have low inductance is also because the mutual partial inductance between forward and return paths is large?

🎓

Perfect understanding. Laminated busbars have a structure where two copper plates 0.5–2 mm thick are sandwiched with an insulating film, with a spacing of only 0.1–0.5 mm between forward and return paths. The narrower the spacing, the closer $M_{p,ij}$ gets to $L_{p,ii}$, so $L_{loop}$ dramatically decreases. What was 30–50 nH with discrete busbars can be reduced to 3–5 nH with laminated busbars.

Theory of the PEEC Method

🧑‍🎓

We talked about partial inductance, and the PEEC method is exactly the technique that uses it, right?

🎓

Yes. The PEEC (Partial Element Equivalent Circuit) method is a technique proposed by Ruehli simultaneously with the concept of partial inductance, and it's the standard method for parasitic inductance extraction.

The basic idea is:

  1. Divide conductors into small segments (cells)
  2. Calculate the self partial inductance $L_p$ and resistance $R$ of each segment
  3. Calculate the mutual partial inductance $M_p$ between segments
  4. If dielectrics are present, also calculate the capacitance coefficients (partial capacitance $C_p$)
  5. Assemble these into an RLC equivalent circuit

The PEEC equation between conductor segments $i$ and $j$ is:

$$ V_i - V_j = R_i I_i + j\omega L_{p,i} I_i + j\omega \sum_{k \neq i} M_{p,ik} I_k $$

In matrix form:

$$ \mathbf{V} = \left(\mathbf{R} + j\omega \mathbf{L}_p\right) \mathbf{I} $$

$\mathbf{L}_p$ becomes a dense matrix (full matrix) of partial inductance, which is a computational bottleneck, but a major advantage is that since only conductors are discretized, meshing of the air region is not required.

🧑‍🎓

Not needing to mesh the air region is convenient! With FEM, you have to mesh the surrounding air region too...

🎓

Yes, that's the biggest strength of the PEEC method. When analyzing busbars and bonding wires of an entire power module, FEM would require millions of elements in the air region, but the PEEC method only needs tens of thousands of cells for the conductors alone. However, dense matrix operations require $O(N^2)$ memory and $O(N^3)$ computation time, so for large-scale problems, acceleration using FMM (Fast Multipole Method) is essential.

3D FEM Formulation

🧑‍🎓

I understand that the PEEC method is strong for inductance extraction. So in what situations is FEM used?

🎓

FEM excels when there are nonlinear materials (B-H curve of iron cores) or complex geometries. For busbars with magnetic shields or power modules with built-in ferrite cores, FEM is the only choice.

The formulation uses the vector potential $\mathbf{A}$. To automatically satisfy magnetic flux conservation $\nabla \cdot \mathbf{B} = 0$, we set $\mathbf{B} = \nabla \times \mathbf{A}$, and from Ampere's law:

$$ \nabla \times \left(\frac{1}{\mu} \nabla \times \mathbf{A}\right) = \mathbf{J}_s + \sigma\left(-\frac{\partial \mathbf{A}}{\partial t} - \nabla \phi\right) $$

Here $\mathbf{J}_s$ is the external current source, and the second term on the right is the eddy current term. Assuming time-harmonic (sinusoidal) conditions, $\partial/\partial t \to j\omega$ gives the frequency-domain formulation.

Discretizing with edge elements (Nedelec elements) yields:

$$ \left(\mathbf{K} + j\omega \mathbf{M}\right) \mathbf{a} = \mathbf{f} $$

$\mathbf{K}$ is the stiffness matrix ($\nabla \times$ term), $\mathbf{M}$ is the mass matrix (eddy current term), and $\mathbf{a}$ is the degree-of-freedom vector on edges.

🧑‍🎓

After solving, how do you extract the inductance value?

🎓

There are mainly two methods:

Energy method (most common):

$$ L = \frac{2 W_{mag}}{I^2} = \frac{2}{I^2} \int_\Omega \frac{1}{2\mu} |\mathbf{B}|^2 \, d\Omega $$

Flux linkage method:

$$ L = \frac{\Lambda}{I} = \frac{N \Phi}{I} = \frac{N}{I} \int_S \mathbf{B} \cdot d\mathbf{S} $$

The energy method involves a volume integral, so it calculates the magnetic field energy of the entire domain including the air region. Therefore, if the air region mesh is too coarse, the result becomes inaccurate. This is the most important point to note when extracting inductance with FEM.

Coffee Break Yomoyama Talk

Neumann Formula — The Mathematical Basis for "Loop Area is Important"

The concept of "loop area" is key to intuitively understanding parasitic inductance. The loop inductance of two parallel conductors (length $l$, spacing $d$, conductor radius $r$) is: $L_{loop} = \frac{\mu_0 l}{\pi} \ln\frac{d}{r}$. Halving the spacing $d$ halves the argument of $\ln$, but due to the logarithmic function, the reduction isn't dramatic. On the other hand, with face-to-face structures like laminated busbars, the cancellation of mutual partial inductance works very efficiently, enabling orders-of-magnitude reduction. This is the practical consequence of Neumann's mutual inductance formula $M = \frac{\mu_0}{4\pi} \oint \oint \frac{d\mathbf{l}_1 \cdot d\mathbf{l}_2}{|\mathbf{r}_{12}|}$.

Physical Meaning of Partial Inductance
  • Self Partial Inductance $L_{p,ii}$: Corresponds to the magnetic energy stored by conductor segment $i$ alone. Increases with longer segments and smaller cross-sectional area. This is why bonding wire parasitic inductance is large (thin + long).
  • Mutual Partial Inductance $M_{p,ij}$: Corresponds to the magnetic energy shared by segments $i$ and $j$. Positive for segments with current flowing in the same direction, negative for opposite directions. Placing forward and return paths close together generates a large positive $M_p$, contributing to loop inductance cancellation.
  • Loop Inductance Cancellation: In $L_{loop} = \sum L_{p} - 2\sum M_{p}$, as the sum of $M_p$ approaches the sum of $L_p$, the loop inductance decreases. In a perfect coaxial structure, it can theoretically be zero.
Limitations and Precautions
  • Quasi-static approximation: The electromagnetic wavelength must be sufficiently larger than the structural dimensions. For frequencies exceeding several hundred MHz, even the PEEC method requires full-wave extension (retarded PEEC).
  • Skin effect: At high frequencies, current concentrates on the conductor surface, reducing effective cross-sectional area. This causes frequency dependence of inductance.
  • Proximity effect: Interaction of current distributions between adjacent conductors. Especially important in laminated busbars.
  • Temperature dependence: Resistivity changes with temperature, but inductance is a geometric quantity and is almost independent of temperature.
Dimensional Analysis and Representative Values
StructureTypical $L_{loop}$Design TargetNotes
Discrete Busbar30–80 nH< 50 nHStandard in Si IGBT era
Laminated Busbar3–10 nH< 5 nHFor SiC modules
Bonding Wire (1 wire)2–5 nHLength 10 mm, diameter 300 μm
PCB Via (1 via)0.5–1 nHThickness 1.6 mm
Inside GaN Semiconductor Package0.2–1 nH< 0.5 nHAssumes flip-chip

Numerical Methods and Implementation

PEEC Method Discretization

🧑‍🎓

I understand the theory of the PEEC method. How do you actually discretize it?

🎓

The basic approach is to divide conductors into rectangular volume filaments. Uniform current density is assumed in each cell, and partial inductance between cells is calculated by numerical integration of the Neumann formula.

Specifically, the mutual partial inductance between cell $i$ (volume $V_i$) and cell $j$ (volume $V_j$) is:

$$ M_{p,ij} = \frac{\mu_0}{4\pi} \frac{1}{a_i a_j} \int_{V_i} \int_{V_j} \frac{\hat{\mathbf{l}}_i \cdot \hat{\mathbf{l}}_j}{|\mathbf{r} - \mathbf{r}'|} \, dV' \, dV $$

$a_i$, $a_j$ are the cross-sectional areas of each cell, and $\hat{\mathbf{l}}$ is the unit vector in the current direction.

This double volume integral can be evaluated quickly using the Graver formula or Hoer-Love formula when an analytical solution exists (e.g., rectangular cells with parallel axes). For arbitrary shapes, Gaussian quadrature is used.

🧑‍🎓

You mentioned the dense matrix is a problem. With $N$ cells, is it an $N \times N$ matrix?

🎓

Yes. Memory is $O(N^2)$, and LU decomposition computational complexity is $O(N^3)$. For $N = 10^5$ (100k cells), $10^{10}$ memory is needed, which is practically impossible. Therefore, the following acceleration techniques are used in tools like Ansys Q3D:

MethodComplexityMemoryOverview
FMM (Fast Multipole Method)$O(N \log N)$$O(N)$Approximates far-field interactions using multipole expansion
ACA (Adaptive Cross Approximation)$O(N \log^2 N)$$O(N \log N)$Low-rank approximation using hierarchical matrices
FFT Acceleration$O(N \log N)$$O(N)$Convolution via FFT on a uniform grid

FEM Energy Method for Inductance Calculation

🧑‍🎓

Please tell me the specific steps for calculating inductance with FEM.

🎓

The steps for the FEM energy method are as follows:

  1. Model Creation: 3D model of conductors + air region. Ensure the air region is 5–10 times the size of the conductors.
  2. Excitation Condition: Apply a known current $I_0$ to the target loop.
  3. Solve: Calculate the magnetic field $\mathbf{B}$.
  4. Post-processing: Perform volume integration of the magnetic energy over the entire domain.
$$ L = \frac{2}{I_0^2} \int_\Omega \frac{|\mathbf{B}|^2}{2\mu} \, d\Omega $$

For mutual inductance, two calculations are needed:

$$ M_{12} = \frac{L_{12} - L_1 - L_2}{2} $$

Here $L_{12}$ is the inductance when current flows simultaneously in loop 1 and loop 2, and $L_1$, $L_2$ are the individual inductances.

関連シミュレーター

この分野のインタラクティブシミュレーターで理論を体感しよう

シミュレーター一覧

関連する分野

電磁気解析連成解析熱解析
この記事の評価
ご回答ありがとうございます!
参考に
なった
もっと
詳しく
誤りを
報告
参考になった
0
もっと詳しく
0
誤りを報告
0
Written by NovaSolver Contributors
Anonymous Engineers & AI — サイトマップ
About the Authors